Glow Discharge Plasma Cleaner
The Glow Discharge Plasma Cleaner is a compact, inexpensive tabletop plasma instrument with a hinged door, viewing window, and fine control metering valve, suitable for nanoscale surface cleaning and activation of small samples.
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- Compact, tabletop unit
- Adjustable RF power settings (Low, Medium, High)
- Maximum RF power of 18W
- Includes a 3″ diameter x 6.5″ length Pyrex chamber
- Hinged door with viewing window
- Active fan cooling
- Integral switch for a vacuum pump
- 1/8″ NPT metering valve to qualitatively control gas flow and chamber pressure
- 1/8″ NPT 3-way valve to quickly switch from introducing gas, venting, and isolating the chamber
- Weight: 13 lbs
- Size: 8.5″ H x 10″ W x 8″ D
- The Glow Discharge Plasma Cleaner requires a vacuum pump with a minimum pump speed of 1.4 m3/hr (23 L/min) and ultimate total pressure of 200 mTorr (0.27 mbar) or less. See the recommended vacuum pump.